Flow Control of Gases.

Our Premium Mass Flow Controller MFC control very precise the effective Flow of the Gases according to the actual Setpoints. You have the Choice, giving this Setpoint by Hand, by analog Signals or by digital Online Communications over your PLC-System. The MFC measures the effective Flow and compares this Result with the actual Setpoint. It’s now the Job of the integrated, powerful Control Valve to regulate the Gas Flow to meet the Value of the Setpoint.

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Technical Gas  Product overview

SmartTrak® 50 Low Flow Controller
Sierra Instruments’ SmartTrak® 50 Series is a digital gas mass flow controller designed to meet the low-cost budgetary requirements of OEM's while maintaining excellent quality and performance. Description

SmartTrak® 50 Medium Flow Controller
Optimized to feature the stability, reliability and simplicity of operation required in long-term process control applications, Sierra's SmartTrak® 50 Series Medium Flow Controller offers high accuracy and reliable gas mass flow control at an economical price. Description

SmartTrak® 100 Mass Flow Controller
SmartTrak ® 100 Series features unprecedented performance, user-friendly features, and flexibility. Description

SmartTrak® 140 Ultra-Low AP Mass Flow Controller

When expensive process gases, where minimal pressure drop is a key consideration for cost savings and efficiency, the SmartTrak® 140 controls up to 500 slpm with an ultra- low ΔP of 4.5 psid (310 mBard), much better than typical ΔP values of 25 psid (1700 mBard) for equivalent mass flow controllers on the market. Precision digital PID valve control means no manual adjustment or tuning. Description

Compod Programmable Control Modul

CompodTM is a programmable control module for Sierra Instruments' 100 Series that makes Smart-Trak® even smarter.


MicroTrak 101 Ultra Flow Mass Flow Controller
Micro-TrakTM measures and controls micromass flows of gas previously thought to be too low for a reliable reading. Micro-TrakTM is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Description

MaxTrak 180 Industrial Mass Flow Controller
Max-TrakTM is an industrial mass flow controller from the company that has been a trusted name in industrial thermal mass flow meters for decades— Sierra Instruments. Description

SideTrak 840 Mass Flow Controller
Sierra Instruments’ Side-Trak® Model 830 Mass Flow Meters and Model 840 Mass Flow Controllers are designed for precise measurement and control of air and process gases in ranges from 0 to 10 sccm up to 0 to 500 slpm. Because all wetted materials are 316 stainless steel, the device accommodates most clean gases, including corrosives. Description