SmartTrak® 50 Medium Flow

Optimized to feature the stability, reliability and simplicity of operation required in long-term process control applications, Sierra's SmartTrak® 50 Series Medium Flow Controller offers high accuracy and reliable gas mass flow control at an economical price.

This makes it an ideal choice for OEMs who require exceptional performance at a price point that meets their budgetary constraints.

Sierra's new medium flow controller increases the maximum flow range of the award-winning SmartTrak 50 Series from 50 slpm to 200 slpm. This makes it a perfect fit for controlling the carrier gases used in wafer cleaning and polishing operations or for purge control in PVD and other semiconductor operations. It also excels in the mass flow control of common gases in general applications.

The 50 Series builds on the same core sensor, LFE and valve technology found in Sierra's flagship Smart-Trak 100 Series, all backed by Sierra's trademark personalized customer support. A flexible and powerful direct-acting frictionless-hovering control valve sets it apart from the competition by minimizing leak-by, while offering +/- 0.25% repeatability.

It is Sierra's philosophy that only the highest performing core sensor technology can produce an excellent MFC. In contrast to the many wetted parts of CMOS and MEMS flow sensors, Sierra uses its advanced 316L stainless steel platinum-wound capillary sensor technology to deliver the highest reliability, repeatability and stable accuracy.

The SmartTrak 50 Series offers flexibility and simplicity of operation. Both analog and digital inputs and outputs are available, enabling the 50 Series to work with older analog systems or the newest multi- drop digital tools. Field adjustment of zero and span enable small adjustments in calibration to align with on-site process conditions.

Experience our passion for flow with the SmartTrak 50 Series Medium Flow Controller and enjoy the peace of mind gained from unparalleled stability, reliability and simplicity in your next application.

  • All the performance features of a digital mass flow meter at an OEM price 
  • Measures gas mass flow rates to 200 slpm (nlpm) 
  • Stability and reliability optimized for long-term process metering 
  • Ideal for meterinng of carrier gases used in wafer cleaning and polishing operations and other semiconductor process applications 
  • Accuracy: +/- 1.5% full scale for common gases (Air, Ar, CO2, CO, CH4, He, H2, O2, N2) 
  • Repeatability: +/- 0.25% full scale 
  • Advanced 316L SS platinum sensor technology and patented LFE provide excellent linear performance 
  • Aluminum or 316 SS flow bodies with Viton® elastomers 
  • Local display and digital and analog output signals 
  • RS-232 interfaces easily with PLC or workstation (user software and communication cables available) 
  • Field adjustable zero and span 
  • RS-485 (addressable) enables networking within complex semiconductor tools 
  • Dual I/O DB9 comm ports for installation flexibility 
  • CE Approved